Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Low Res''' 213µm x 160µm <br> | '''Low Res''' 213µm x 160µm <br> | ||
'''Overview''' 13mm x 10mm | '''Overview''' 13mm x 10mm | ||
'''Accessible stage coordinates:''' <br> | |||
'''High/Low Res''' X = ±108mm; Y = ±108mm <br> | |||
'''Overview''' X = ±108mm; Y = +39mm, -180mm <br> | |||
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