Jump to content

Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 532: Line 532:


==Top Side Alignment==
==Top Side Alignment==
Overlay accuracy (specs): 0.5µm


'''Camera field of view (W x H):''' <br>
'''Camera field of view (W x H):''' <br>