Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Low Res''' 213µm x 160µm <br> | '''Low Res''' 213µm x 160µm <br> | ||
'''Overview''' 13mm x 10mm | '''Overview''' 13mm x 10mm | ||
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! width="320" | | |||
! width="320" | | |||
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|[[Image:MLA150 TSA Overview.JPG|300px]] | |||
|[[Image:MLA150_TSA_Low_Res.JPG|300px]] | |||
|[[Image:MLA150_TSA_High_Res.JPG|300px]] | |||
|- align="center" | |||
| Overview camera image of a TSA alignment mark during alignment. The circle is 3mm in diameter. || Low Res camera image of a TSA alignment mark during alignment. The lines of the cross are 20µm wide. || High Res camera image of a TSA alignment mark during alignment. The lines of the central cross are 3µm wide. | |||
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