Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 683: | Line 683: | ||
'''Camera field of view (W x H):''' 640µm x 480µm | '''Camera field of view (W x H):''' 640µm x 480µm | ||
[[Image:MLA150_BSA_Backside.JPG|400x400px|thumb|Image of a BSA alignment mark during alignment. The mark is 300µm wide.]] | |||
{| cellpadding="2" style="border: 2px solid darkgray;" align="right" | {| cellpadding="2" style="border: 2px solid darkgray;" align="right" | ||