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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 682: Line 682:


'''Camera field of view (W x H):''' 640µm x 480µm
'''Camera field of view (W x H):''' 640µm x 480µm


{| cellpadding="2" style="border: 2px solid darkgray;" align="right"
{| cellpadding="2" style="border: 2px solid darkgray;" align="right"
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|}
|}


*Tested, 2-3µm error in X observed
*Corrected


{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;"  
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|rowspan="2" align="center"|Align-flip180-align, 3 points
|rowspan="2" align="center"|Align-flip180-align, 3 points
|'''X'''
|'''X'''
| -0.67±0.125
| -0.625±0.125
|rowspan="2" align="center"|0.5µm verniers, May 2019
|rowspan="2" align="center"|0.5µm verniers, May 2019


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| -0.67±0.25
| -0.75±0.25


|-
|-
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