Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 710: | Line 710: | ||
!colspan="2" align="center"| | !colspan="2" align="center"| | ||
!Offset [µm] | !Offset [µm] | ||
!Comment | |||
|- | |- | ||
| Line 717: | Line 718: | ||
|'''X''' | |'''X''' | ||
| 0.25±0.25 | | 0.25±0.25 | ||
|rowspan="2" align="center"|1µm verniers, April 2019 | |||
|- | |- | ||
| Line 722: | Line 724: | ||
|'''Y''' | |'''Y''' | ||
| 0.25±0.25 | | 0.25±0.25 | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|Align-flip180-align, 3 points | |||
|'''X''' | |||
| -0.67±0.125 | |||
|rowspan="2" align="center"|0.5µm verniers, May 2019 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| -0.67±0.25 | |||
|- | |- | ||
| Line 728: | Line 742: | ||
|'''X''' | |'''X''' | ||
| 0.0±0.0 | | 0.0±0.0 | ||
|rowspan="2" align="center"|Not performed yet | |||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||