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The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.
The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Danchip.


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===Material for preparations and further information===
===Slides from the lecture===


'''<big>Slides from Lecture</big>'''
*Lecture slide show [[Media:Danchip_SEM_lecture_January2019_LabAdviser.pptx]]
*Lecture slide show [[Media:Danchip_SEM_lecture_January2019_LabAdviser.pptx]]


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!colspan="2"|SEM Tool Package Training
!colspan="2"|Thin film tool package training (TPT)
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'''Theoretical part'''
'''Theoretical part'''
* A 3-hour lecture. The next lectures will be held Tuesday the 28th of May 2019 from 9:00 to 12:00. Sign up here: https://danchip.doodle.com/poll/udmcihbbgudyynfy.
 
*Two lectures:
 
<big>1st lecture (2 hours)</big>
*An introduction to thin films
*Material properties
*Overview of different thin film techniques at DTU Nanolab – 1st part:
**Thermal oxidation
**Electroplating
 
Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/k4pdm2n4bpseww5e
 
<big>2nd lecture (3 hours)</big>
*Vacuum basics
*Overview of different thin film techniques at DTU Nanolab – 2nd part:
*PVD (physical vapour deposition)
**E-beam evaporation
**Thermal evaporation
**Sputtering
*CVD (chemical vapour depostion)
**LPCVD
**PECVD
*ALD (atomic layer deposition)
 
Check the date for when the next lecture will be held and sign up here: https://danchip.doodle.com/poll/4r3ydwzzbrdepgpf


'''Practical part'''
'''Practical part'''
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'''Theoretical part'''
'''Theoretical part'''
* The location of the lecture will be notified after you have signed up  
* The location of the lecture will be notified after you have signed up  
'''Practical part'''
 
* The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
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!Qualified Prerequisites
!Qualified Prerequisites
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*
None
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!Preparations
!Preparations
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'''Before the lecture'''
None
*Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Danchip. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found [http://www.charfac.umn.edu/sem_primer.pdf here]
 
'''Before the first group training session'''
* Watch the training videos: You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj
 
'''Before the one-on-one hands-on'''
* Look at the presentation [[Media:Operating_SEM_Supra_1_final.pptx]]
* Read the user manual for SEM Supra 1 Click [http://labmanager.dtu.dk/d4Show.php?id=2180&mach=275 here]
 
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!Course Responsible
!Course Responsible
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The SEM Group at DTU Danchip (SEM@danchip.dtu.dk).
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk).
 
Sign up for the course by e-mailing to [mailto:sem@danchip.dtu.dk sem@danchip.dtu.dk].  
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!Learning Objectives
!Learning goals
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*Prepare samples and safely operate SEM
*Be aware of relevant material properties for thin films made in the cleanroom
*Understand possibilities and limitations of SEM
*Understand importance of correct process pressure (for vacuum processes)
*Explain SEM electron optics and detectors
*Understand different thin film techniques
*Optimize and analyse SEM images
*Compare and be able to select appropriate thin film technique


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===Slides from the lectures===
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'''<big>Slides from lecture 1</big>'''
'''<big>Slides from lecture 1</big>'''
*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]
*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_May2019.pptx]]
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