Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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| Line 259: | Line 259: | ||
|rowspan="2"|405 nm | |rowspan="2"|405 nm | ||
|'''X''' | |'''X''' | ||
| | | 532±64 | ||
| | | 251 | ||
|rowspan="2" align="mid"| | |rowspan="2" align="mid"| 333 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| | | 599±58 | ||
| | | 382 | ||
|- | |- | ||
| Line 273: | Line 273: | ||
|rowspan="2"|375 nm | |rowspan="2"|375 nm | ||
|'''X''' | |'''X''' | ||
| | | 556±44 | ||
| | | 214 | ||
|rowspan="2" align="mid"| | |rowspan="2" align="mid"| 347 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| | | 579±63 | ||
| | | 224 | ||
|} | |} | ||