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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,794 edits
Line 242: Line 242:
*SAT results?
*SAT results?


'''Exposed on mask blank with AZ1500 (possibly S1800) and transferred via wet chrome etch'''
'''Exposed on mask blank with AZ1500 (possibly S1800) at DTU, then transferred via wet chrome etch and measured at Heidelberg'''


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