Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 258: | Line 258: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|405 nm | |rowspan="2"|405 nm | ||
|'''X''' | |||
| kjhf | |||
| 100 | |||
|rowspan="2" align="mid"| 0.000 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| 101 | |||
| 0.2±0.05 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|375 nm | |||
|'''X''' | |'''X''' | ||
| kjhf | | kjhf | ||