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| Line 203: |
Line 203: |
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| *SAT results? | | *SAT results? |
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| '''Data represent dose-defocus tests on Si using optical autofocus unless otherwise stated'''
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|
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| {|border="1" cellspacing="1" cellpadding="7" style="text-align:left;"
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| |-
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|
| |
| |-
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| |-style="background:silver; color:black"
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| |
| |
| !Thickness
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| !Laser
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| !Exposure mode
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| !Dose
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| !Defoc
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| !Resolution
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| !Comments
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| |-
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|
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| !rowspan="2"| AZ 5206E
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| |rowspan="2"| 0.5 µm
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| |rowspan="2"| 375 nm
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| | Fast
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| | 60 mJ/cm<sup>2</sup>
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| | -6
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| | 1 µm (not optimized)
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| | Dev: 2xSP30s
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| |-style="background:WhiteSmoke; color:black"
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| | Quality
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| | 60 mJ/cm<sup>2</sup>
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| | -6
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| | ~750 nm (not optimized)
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| | Dev: 2xSP30s
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| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black"
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| !rowspan="3"| AZ 5214E
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| |rowspan="3"| 1.5 µm
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| | 405 nm
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| | Fast
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| | 90 mJ/cm<sup>2</sup>
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| | -2
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| | 1-2 µm
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| | Dev: SP60s
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| |-style="background:LightGrey; color:black"
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| |rowspan="2"| 375 nm
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| | Fast
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| | 65 mJ/cm<sup>2</sup>
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| | 2
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| | ~1 µm
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| | Dev: SP60s
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| |-style="background:LightGrey; color:black"
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| | Quality
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| | 65 mJ/cm<sup>2</sup>
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| | 2
| |
| | ~750 nm
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| | Dev: SP60s
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| |-
| |
|
| |
| |-
| |
| |-style="background:WhiteSmoke; color:black"
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| !rowspan="3"| AZ MiR 701
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| |rowspan="3"| 1.5 µm
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| | 405 nm
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| | Fast
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| | 200 mJ/cm<sup>2</sup>
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| | -5
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| | ~1 µm (not optimized)
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| | PEB: 60s@110°C, Dev: SP60s
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| |-style="background:WhiteSmoke; color:black"
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| |rowspan="2"| 375 nm
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| | Fast
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| | 170 mJ/cm<sup>2</sup>
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| | -5
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| | 1 µm
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| | PEB: 60s@110°C, Dev: SP60s
| |
| |-style="background:WhiteSmoke; color:black"
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| | Quality
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| | 180 mJ/cm<sup>2</sup>
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| | -6 (Feb 2019) <br> -2 (Apr 2019)
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| | <750 nm
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| | PEB: 60s@110°C, Dev: SP60s <br> Large structures probably over-exposed
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| |-
| |
|
| |
| |-
| |
| |-style="background:LightGrey; color:black"
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| !rowspan="2"| AZ nLOF 2020
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| |rowspan="2"| 2 µm
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| |rowspan="2"| 375 nm
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| | Fast
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| | 400 mJ/cm<sup>2</sup>
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| | 5
| |
| | ~1 µm (not optimized)
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| | Dev: SP60s <br> Probably under-exposed
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| |-style="background:LightGrey; color:black"
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| | Quality
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| | 400 mJ/cm<sup>2</sup>
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| | 0
| |
| | 1 µm
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| | Dev: SP60s <br> Probably under-exposed
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| |-
| |
|
| |
| |}
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| <br clear="all" />
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|
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|
| ==Writing speed== | | ==Writing speed== |
