Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
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At Danchip we have five systems for topographic measurements: | At Danchip we have five systems for topographic measurements: | ||
*Dektak stylus profilers (Dektak XTA, Dektak | *Dektak stylus profilers (Dektak XTA, Dektak 3ST and Dektak 8) - ''Profiler for measuring micro structures'' | ||
*Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | *Optical Profiler (Sensofar) - ''3D Profiler for measuring micro structures'' | ||
*Nanoman - ''AFM for measuring nano structures'' | *Nanoman - ''AFM for measuring nano structures'' | ||