Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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== Dektak | == Dektak 3ST == | ||
[[image:III-V profiler.JPG|300x300px|right|thumb|The profiler place | [[image:III-V profiler.JPG|300x300px|right|thumb|The profiler place at 346-907 (Dektak 3ST).]] | ||
The | The Dektak 3ST is intended for profile measurements on sample outside the cleanroom. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=184 | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=184 Dektak 3ST (Dektak) in LabManager] | ||
The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick. | The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick. | ||
===Equipment performance and process related parameters | ===Equipment performance and process related parameters=== | ||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
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*III-V | *III-V | ||
* Silicon | * Silicon | ||
* polymer | |||
|} | |} | ||
==Comparing the profilers== | ==Comparing the profilers== | ||
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||