Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 525: | Line 525: | ||
|rowspan="2"|not used | |rowspan="2"|not used | ||
| -2.75±3.0 | | -2.75±3.0 | ||
| -2.98±0. | | -2.98±0.25 | ||
| - | | -101±8.3 | ||
| -0. | | -0.6±5.9 | ||
|- | |- | ||
| Line 534: | Line 534: | ||
| not used | | not used | ||
| 3.0±2.9 | | 3.0±2.9 | ||
| 3.12±0. | | 3.12±0.25 | ||
| -96. | | -96.1±8.3 | ||
| 0. | | 0.0±5.9 | ||
|} | |} | ||