Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions
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=== Other etch processes === | === Other etch processes === | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch| | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Continuous nanostructure etches including nano1.42]] | ||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoDREM|DREM process in nanostructures]] | |||
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch|Etch processes with DUV masks]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch|Etch processes with DUV masks]] | ||