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Specific Process Knowledge/Etch/DRIE-Pegasus/Etch silicon nanostructures: Difference between revisions

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image:DREM2.jpg
image:DREM2.jpg
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Below are some etched silicon nanostructures with the recipe '''DREM 1kW nano'''
Below are some etched silicon nanostructures with the recipe '''DREM 0.5kW nano'''