Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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| Layer thickness | | Layer thickness | ||
| | |10 Å to 1 µm | ||
| | |10 Å to 1500 Å | ||
| | |10 Å to 1 µm | ||
| | |10 Å to | ||
|- | |- | ||
| Deposition rate | | Deposition rate | ||
| | |2 Å/s to 15 Å/s | ||
| | |1 Å/s to 5 Å/s | ||
| | |1 Å/s to 15 Å/s | ||
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