Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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-11.08 to 5.54mRad, corresponding to -0.6 to 0.3°, average -0.1±0.5° (6 measurements, including 2 without pushing the alignment tool). Measured using pneumatic autofocus. | -11.08 to 5.54mRad, corresponding to -0.6 to 0.3°, average -0.1±0.5° (6 measurements, including 2 without pushing the alignment tool). Measured using pneumatic autofocus. | ||
It would seem that applying the flat angle measured with optical autofocus to the print introduces more error than relying only on the alignment tool. | |||
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