Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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This shows that using optical autofocus significantly increases the error on the flat measurement, while using pneumatic atuofocus performs similar to Aligner: Maskless 01. It is thus recommended to use pneumatic autofocus for the first print if crystal alignment is important for subsequent processing. | |||
'''Result of using only the alignment tool, pushing it to the extremes:''' | '''Result of using only the alignment tool, pushing it to the extremes:''' | ||