Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Result of using only the alignment tool, pushing it to the extremes:''' | '''Result of using only the alignment tool, pushing it to the extremes:''' | ||
-11.08 to 5.54mRad, corresponding to -0.6 to 0.3°, average -0.1±0.5° ( | -11.08 to 5.54mRad, corresponding to -0.6 to 0.3°, average -0.1±0.5° (6 measurements, including 2 without pushing the alignment tool). Measured using pneumatic autofocus. | ||
<br clear="all" /> | <br clear="all" /> | ||