Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Camera field of view (W x H):''' 640µm x 480µm | '''Camera field of view (W x H):''' 640µm x 480µm | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align="right" | |||
! width="320" | | |||
! width="320" | | |||
! width="320" | | |||
! width="320" | | |||
|- border="0" align="center" | |||
|[[Image:MLA150 BSA 2inch.JPG|300px]] | |||
|[[Image:MLA150_BSA_4inch.JPG|300px]] | |||
|[[Image:MLA150_BSA_6inch_mod.jpg|300px]] | |||
|[[Image:MLA150_BSA_8inch_mod.jpg|300px]] | |||
|- align="center" | |||
| 2" || 4" || 6" || 8" | |||
|} | |||
*Tested, 2-3µm error in X observed | *Tested, 2-3µm error in X observed | ||