Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
| Line 137: | Line 137: | ||
*Speed vs. design | *Speed vs. design | ||
Design: 5 100µm wide, 40mm long lines, spaced 10mm apart (40x40mm<sup>2</sup>) | '''Design case: 5 100µm wide, 40mm long lines, spaced 10mm apart (40x40mm<sup>2</sup>)''' | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align="right" | {| cellpadding="2" style="border: 2px solid darkgray;" align="right" | ||
| Line 144: | Line 144: | ||
|- border="0" align="center" | |- border="0" align="center" | ||
|[[Image: | |[[Image:MLA150_LongLinesEW.JPG|300px]] | ||
|[[Image: | |[[Image:MLA150 LongLinesNS.JPG|300px]] | ||
|- align="center" | |- align="center" | ||