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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 422: Line 422:
375nm, high res camera
375nm, high res camera
|'''X'''
|'''X'''
| 0±0
| -1
|rowspan="2" align="center"|0.000±0.000
|rowspan="2" align="center"|0.001
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
Line 432: Line 432:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0±0
| -1
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
Line 441: Line 441:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
405nm, high res camera
375nm, low res camera
|'''X'''
|'''X'''
| 0±0
| -6
|rowspan="2" align="center"|0.000±0.000
|rowspan="2" align="center"|0.002
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
Line 453: Line 453:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0±0
| -2
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
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