Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 472: | Line 472: | ||
375nm, high res camera | 375nm, high res camera | ||
|'''X''' | |'''X''' | ||
| 100 | | 100 | ||
|rowspan="2" align="center"|0. | |rowspan="2" align="center"|0.000 | ||
| -0.05±0.1 | | -0.05±0.1 | ||
| -0.01±0.05 | | -0.01±0.05 | ||
| Line 482: | Line 482: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| | | 101 | ||
| 0.2±0.05 | | 0.2±0.05 | ||
| 0.18±0.05 | | 0.18±0.05 | ||
| Line 495: | Line 495: | ||
| not used | | not used | ||
|rowspan="2"|not used | |rowspan="2"|not used | ||
| | | -2.75±3.0 | ||
| | | -2.98±0.05 | ||
| | | -101±1.7 | ||
| 0. | | -0.6±1.2 | ||
|- | |- | ||
| Line 504: | Line 504: | ||
|'''Y''' | |'''Y''' | ||
| not used | | not used | ||
| | | 3.0±2.9 | ||
| | | 3.12±0.05 | ||
| | | -96.1±1.7 | ||
| 0.0±1. | | 0.0±1.2 | ||
|} | |} | ||