Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Top Side Alignment== | ==Top Side Alignment== | ||
''' | '''Camera field of view (W x H):''' <br> | ||
'''High Res''' 64µm x 48µm <br> | '''High Res''' 64µm x 48µm <br> | ||
'''Low Res''' 213µm x 160µm <br> | '''Low Res''' 213µm x 160µm <br> | ||