Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
Appearance
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'''Field of view:''' <br> | '''Field of view:''' <br> | ||
'''High Res''' 190µm x 140µm <br> | '''High Res''' 190µm x 140µm <br> | ||
'''Low Res | '''Low Res''' 640µm x 480µm <br> | ||
'''Overview | '''Overview''' 12mm x 9mm | ||
*4 marks (before final installation) | *4 marks (before final installation) | ||