Jump to content

Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 332: Line 332:
'''Field of view:''' <br>
'''Field of view:''' <br>
'''High Res''' 190µm x 140µm <br>
'''High Res''' 190µm x 140µm <br>
'''Low Res:''' 640µm x 480µm <br>
'''Low Res''' 640µm x 480µm <br>
'''Overview:''' 12mm x 9mm
'''Overview''' 12mm x 9mm


*4 marks (before final installation)
*4 marks (before final installation)