Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Top Side Alignment== | ==Top Side Alignment== | ||
'''Field of view:''' | '''Field of view:''' <br> | ||
'''High Res''' 190µm x 140µm | '''High Res''' 190µm x 140µm <br> | ||
'''Low Res:''' 640µm x 480µm | '''Low Res:''' 640µm x 480µm <br> | ||
'''Overview:''' 12mm x 9mm | '''Overview:''' 12mm x 9mm | ||