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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
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==Back Side Alignment==
==Back Side Alignment==


'''Field of view:''' 640µm X 480µm
'''Field of view:''' 640µm x 480µm


*Tested, 2-3µm error in X observed
*Tested, 2-3µm error in X observed