Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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==Back Side Alignment== | ==Back Side Alignment== | ||
'''Field of view:''' 640µm | '''Field of view:''' 640µm x 480µm | ||
*Tested, 2-3µm error in X observed | *Tested, 2-3µm error in X observed | ||