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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 512: Line 512:
|-style="background:silver; color:black"
|-style="background:silver; color:black"
!colspan="2" align="center"|
!colspan="2" align="center"|
!Shift (median) [µm]
!Shift (median) [nm]
!Misplacement [µm]
!Misplacement [nm]
|-
|-


Line 521: Line 521:
375nm, high res camera
375nm, high res camera
|'''X'''
|'''X'''
| 0.05±0.075
| 50±75
| 0.07±0.075
| 70±75


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0.150±0.05
| 150±50
| 0.128±0.05
| 128±50


|-
|-
Line 535: Line 535:
375nm, high res camera
375nm, high res camera
|'''X'''
|'''X'''
| -0.025±0.05
| -25±50
| -0.005±0.05
| -5±50


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0.1±0.05
| 100±50
| 0.12±0.05
| 120±50


|-
|-
Line 549: Line 549:
405nm, high res camera
405nm, high res camera
|'''X'''
|'''X'''
| 0.1±0.075
| 100±75
| 0.108±0.075
| 108±75


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| 0.0±0.05
| 0±50
| 0.016±0.05
| 16±50


|}
|}
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