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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Line 344: Line 344:
|'''Y'''
|'''Y'''
| NA
| NA
| 0.0±0.05
| 0.0±0.05
| 0.0±1.18
| 0.0±1.67
|-
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
375nm, high res camera
|'''X'''
| 0±0
|rowspan="2" align="center"|0.000±0.000
| 0.0±0.05
| 0.0±0.05
| 0.0±1.18
| 0.0±1.67
|-
|-style="background:WhiteSmoke; color:black"
|'''Y'''
| 0±0
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
Line 375: Line 396:
405nm, high res camera
405nm, high res camera
|'''X'''
|'''X'''
|NA
| not used
|rowspan="2"|NA
|rowspan="2"|not used
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
Line 385: Line 406:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| NA
| not used
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
| 0.0±0.05
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