Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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*Substrate centering + flat alignment test | *Substrate centering + flat alignment test | ||
== | ==Labeling== | ||
HIMT\Designs\Labels\labelfile.lbl (tab-delimited ASCII file with special header). | HIMT\Designs\Labels\labelfile.lbl (tab-delimited ASCII file with special header). | ||
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Some special characters are not allowed (e.g. ';'). | Some special characters are not allowed (e.g. ';'). | ||
[[Image:MLA150_label.JPG|400x400px|thumb|An example of wafer ID produced by the labeling function]] | |||
==High Aspect Ratio (DOF) mode== | ==High Aspect Ratio (DOF) mode== | ||