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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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'''Dose compared to 365nm exposure (using e.g. Aligner: MA6-2 or Aligner: Maskless 01):'''  
'''Exposure dose relative to exposure at 365nm (e.g. Aligner: Maskless 01):'''  
{|border="1" cellspacing="1" cellpadding="7" style="text-align:center;"  
{|border="1" cellspacing="1" cellpadding="7" style="text-align:center;"  
|-
|-
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!AZ 5214E
!AZ 5214E
|1
|0.95
|1.15 <sup>1)</sup>
|1.3
|-
|-


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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!AZ 4562
!AZ 4562
|1
|?
|1.15 <sup>1)</sup>
|?
|-
|-


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!AZ MiR 701
!AZ MiR 701
|1
|1
|1.15 <sup>1)</sup>
|1.2
|-
|-


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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!AZ nLOF 2020
!AZ nLOF 2020
|1
|3
|1.15 <sup>1)</sup>
|NA
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!SU-8
!SU-8
|1
|10
|1.15 <sup>1)</sup>
|NA
|-
|-
|}
|}
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