Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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In the case of the silicon etching on the ASE, an etch phase with SF<sub>6</sub> and O<sub>2</sub> alternates with a passivation phase with C<sub>4</sub>F<sub>8</sub>. | In the case of the silicon etching on the ASE, an etch phase with SF<sub>6</sub> and O<sub>2</sub> alternates with a passivation phase with C<sub>4</sub>F<sub>8</sub>. | ||
==Process information== | |||
*[[Specific Process Knowledge/Etch/Etching of Silicon/Si etch using ASE|Etch of Silicon using ASE]] | |||