Jump to content

Specific Process Knowledge/Etch/Etching of Silicon/Si etch using ASE: Difference between revisions

BGE (talk | contribs)
BGE (talk | contribs)
Line 149: Line 149:


{| border="1" cellspacing="1" cellpadding="2"  align="left"
{| border="1" cellspacing="1" cellpadding="2"  align="left"
! Recipe:
!  
!  
!
!
|-  
|-  
|  
|  
|
|
|
|-
|-
|
|
|
|
|
|-  
|-  
|
|
|
|
|
|-
|-
|
|
|
|
|
|-
|-
|}
|}