Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
|style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | ||
Line scan x: 50 µm to | Line scan x: 50 µm to 100 mm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
|style="background:LightGrey; color:black"|Scan range z | |style="background:LightGrey; color:black"|Scan range z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
50 Å to | 50 Å to 1 mm | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||
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|style="background:LightGrey; color:black"|Resolution z | |style="background:LightGrey; color:black"|Resolution z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
1Å, 10Å or | 1Å, 10Å, 40Å or 160Å | ||
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|style="background:silver; color:black"| | |style="background:silver; color:black"| | ||