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Specific Process Knowledge/Wafer and sample drying/Critical Point Dryer: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, danchip
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*Pieces (up to 10x10mm)   
*Pieces (up to 10x10mm)   
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| style="background:LightGrey; color:black"|Substrate material allowed
| style="background:LightGrey; color:black"|Materials allowed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Silicon wafers
*Please consult the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=254 Critical Point Dryer cross contamination sheet]
*Quartz wafers
*Pyrex wafers
*InAlP
*GaAs
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| style="background:LightGrey; color:black"|Material allowed on the substrate
|style="background:WhiteSmoke; color:black"|
*Silicon oxide
*Silicon nitride
*Poly Silicon
*SU-8
|-  
|-  
|}
|}
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