Specific Process Knowledge/Back-end processing/Polisher CMP: Difference between revisions
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== Polisher (CMP) == | == Polisher (CMP) == | ||
[[image:Cmp_picture.jpg|400px|right|thumb|The Logitech PM5 Polisher/Lapper]] | [[image:Cmp_picture.jpg|400px|right|thumb|The Logitech PM5 Polisher/Lapper in cleanroom A-5]] | ||
The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates. | The Logitech Orbis Polisher (CMP) is for polishing wafers (removing material in the nm range) it is not for thinning down wafers or other substrates. | ||