Specific Process Knowledge/Etch/DRIE-Pegasus/processC: Difference between revisions
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| colspan="4" | Temperature 10 degs, HBC 10 torr, long funnel, with baffle & 100 mm spacers | | colspan="4" | Temperature 10 degs, HBC 10 torr, long funnel, with baffle & 100 mm spacers | ||
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<gallery> | |||
Image:c1 30 nm dots.jpg | |||
Image:c1 50 nm dots 2.jpg | |||
Image:r1 300 nm dots 1.jpg | |||
</gallery> | |||