Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBSD of Si: Difference between revisions

@@ Line 4: / Line 4: @@
 {| border="2" cellspacing="1" cellpadding="3" align="left"
 !&nbsp;
-!Recipe 2 - with the new (small) grids)
+!Recipe 2 - with the small grids)
 |-
 |Platen angle
@@ Line 37: / Line 37: @@
 <br clear="all" />
-===Results with recipe 2 and the new (small) grids===
+===Results with recipe 2 and the small grids===
 {| border="2" cellspacing="1" cellpadding="3" align="left"
@@ Line 79: / Line 79: @@
 {| border="2" cellspacing="1" cellpadding="3" align="left"
 !&nbsp;
-!Recipe 1 - with the old (large) grids)
+!Recipe 1 - with the large grids)
 |-
 |Platen angle
@@ Line 112: / Line 112: @@
 <br clear="all" />
-===Results with recipe 1 and the old (large) grids===
+===Results with recipe 1 and the large grids===
 {| border="2" cellspacing="1" cellpadding="3" align="left"