Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Au etch: Difference between revisions
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==IBE Au etch with Ti mask== | ==IBE Au etch with Ti mask== | ||
''by | ''by bghe@nanolab'' | ||
Work has been started to find a good process for etching gold with a Titanium mask with high selektivity. | Work has been started to find a good process for etching gold with a Titanium mask with high selektivity. | ||