Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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==Writing speed== | ==Writing speed== | ||
[[Image:WritingSpeedVSDose.JPG| | [[Image:WritingSpeedVSDose.JPG|400x400px|thumb|The writing speed of Aligner: Maskless 01 as a function of the exposure dose]] | ||
The site acceptance test performed during the installation of the Aligner: Maskless 01 showed an exposure time/speed of 0.025 min/mm<sup>2</sup>, which is slightly lower than the 0.02 min/mm<sup>2</sup> given in the specifications. At such speeds, a full 4" design would take 2:30-3:15 hours to expose. In practice, we observe exposure times in excess of 2 hours for a full 4" design. | The site acceptance test performed during the installation of the Aligner: Maskless 01 showed an exposure time/speed of 0.025 min/mm<sup>2</sup>, which is slightly lower than the 0.02 min/mm<sup>2</sup> given in the specifications. At such speeds, a full 4" design would take 2:30-3:15 hours to expose. In practice, we observe exposure times in excess of 2 hours for a full 4" design. | ||