Specific Process Knowledge/Etch: Difference between revisions
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=Wet etch or dry etch= | =Wet etch or dry etch= | ||
Etching at Nanolab | Etching at Nanolab Fabrication can be done either with wet chemistry or in dry etch equipment. In general wet chemistry etches isotropically in most materials were as dry etch techniques can be optimized to transfer a given mask pattern with vertical sidewalls (anisotropically) to a given substrate. | ||
'''Advantages of wet chemistry over dry etch techniques are:''' | '''Advantages of wet chemistry over dry etch techniques are:''' | ||