Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
| Line 129: | Line 129: | ||
| style="background:LightGrey; color:black"|Characteristics | | style="background:LightGrey; color:black"|Characteristics | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Speed up to | * Speed up to 2000 mm/s | ||
* M2 factor : <1.3 | * M2 factor : <1.3 | ||
* Beam shape : Gaussian | * Beam shape : Gaussian | ||