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Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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Chasil (talk | contribs)
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| style="background:LightGrey; color:black"|Characteristics  
| style="background:LightGrey; color:black"|Characteristics  
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|style="background:WhiteSmoke; color:black"|
* Speed up to 8000 mm/s
* M2 factor : <1.3
* Beam shape : Gaussian
{|
| align="center" |


{| {{table}}
| align="center" |
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
! Parameters
! Min
! Max
|-
| Speed
| -
| 2000mm/s
|-
| [[/fluence|Fluence]]
| 0,04 J/cm2
| 87 J/cm2
|-
| Spot size
| ~10µm
| ~74µm
|-
|Pulse energy
| 0,07µJ (TB)
| 140µJ (TB) / 800 µJ (IPG)
|-
| Peak irradiance
| 4GW/cm2
| 5400 GW/cm2
|-
| M^2
| -
| 1,3
|}
|-
|}
|}
|}