Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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|- | |- | ||
| [[/fluence|Fluence]] | | [[/fluence|Fluence]] | ||
| 0, | | 0,04 J/cm2 | ||
| | | 87 J/cm2 | ||
|- | |- | ||
| Spot size | | Spot size | ||