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Specific Process Knowledge/Thin film deposition/Deposition of Zinc: Difference between revisions

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Frequently exchange the QCM crystal (quartz crystal monitor) which is used to measure the thickness of the deposited film. After about 1 micron accumulated deposition, the crystal severely underestimated the thickness, whereas a fresh sensor measured accurately (film thickness verified with Dektak profilometry).  
Frequently exchange the QCM crystal (quartz crystal monitor) which is used to measure the thickness of the deposited film. After about 1 micron accumulated deposition, the crystal severely underestimated the thickness, whereas a fresh sensor measured accurately (film thickness verified with Dektak profilometry).  


[[File:Zn dep rates.png|400px|right|thumb|The quartz crystal monitor at the back of the machine, which should be exchanged frequently.]]
[[File:QCM.png|400px|right|thumb|The quartz crystal monitor at the back of the machine, which should be exchanged frequently.]]