Specific Process Knowledge/Thin film deposition/Deposition of Zinc: Difference between revisions
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Frequently exchange the QCM crystal (quartz crystal monitor) which is used to measure the thickness of the deposited film. After about 1 micron accumulated deposition, the crystal severely underestimated the thickness, whereas a fresh sensor measured accurately (film thickness verified with Dektak profilometry). | Frequently exchange the QCM crystal (quartz crystal monitor) which is used to measure the thickness of the deposited film. After about 1 micron accumulated deposition, the crystal severely underestimated the thickness, whereas a fresh sensor measured accurately (film thickness verified with Dektak profilometry). | ||
[[File: | [[File:QCM.png|400px|right|thumb|The quartz crystal monitor at the back of the machine, which should be exchanged frequently.]] | ||