Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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2) Check that there is enough material in the pocket, so that the beam does not hit the bottom of the pocket. If you burn a hole in the bottom of the pocket, cooling water can leak into the chamber and it may flood! | 2) Check that there is enough material in the pocket, so that the beam does not hit the bottom of the pocket. If you burn a hole in the bottom of the pocket, cooling water can leak into the chamber and it may flood! | ||
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==Particulates on the films== | |||
== Process information == | == Process information == | ||