Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
Appearance
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>AFM Icon</b> | |style="background:WhiteSmoke; color:black"|<b>AFM Icon</b> | ||
|style="background:WhiteSmoke; color:black"|<b>AFM Icon 2</b> | |||
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
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*Adhesion | *Adhesion | ||
*Deformation | *Deformation | ||
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*Surface roughness measurement | |||
*Step/structure hight measurement | |||
*Surface image | |||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||