Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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* For thicknesses above 600 nm permission is required | * For thicknesses above 600 nm permission is required | ||
* Takes approx. 20 min to pump down. | * Takes approx. 20 min to pump down. | ||
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* For thicknesses above 600 nm permission is required | * For thicknesses above 600 nm permission is required | ||
* Takes approx. 1 hour to pump down. | * Takes approx. 1 hour to pump down. | ||
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* For thicknesses above 200 nm permission is required | * For thicknesses above 200 nm permission is required | ||
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* Used for gold sputter coating of samples before SEM inspection | * Used for gold sputter coating of samples before SEM inspection | ||