Specific Process Knowledge/Characterization/XRD: Difference between revisions
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For film thickness measurement, films op to around 100 nm can be measured. You are welcome to try it on thicker films, but please confirm the measurement the first time by use of other equipment. XRR is a special case of a Theta/2Theta measurement. | For film thickness measurement, films op to around 100 nm can be measured. You are welcome to try it on thicker films, but please confirm the measurement the first time by use of other equipment. XRR is a special case of a Theta/2Theta measurement. | ||
Rigaku gives a good explanation of the principles behind the XRR in [[:File:X-ray thin film measurements techniques V X-ray reflectivity measurements.pdf|this paper.]] | Rigaku gives a good explanation of the principles behind the XRR in [[:File:X-ray thin film measurements techniques V X-ray reflectivity measurements.pdf|this paper.]] | ||
[[File:XRR.png|400px]] | [[File:XRR.png|400px]] | ||
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A rocking curve is measured by fixing the 2Theta angle and changing the incident angle omega, which is the same as rocking the sample in the setup. This can be used to determine the preferred orientation and the degree of orientation of the measured material. For a perfect crystal and rocking curve will show a single sharp peak, if the layers are not perfect crystalline the diffraction peak will broaden. | A rocking curve is measured by fixing the 2Theta angle and changing the incident angle omega, which is the same as rocking the sample in the setup. This can be used to determine the preferred orientation and the degree of orientation of the measured material. For a perfect crystal and rocking curve will show a single sharp peak, if the layers are not perfect crystalline the diffraction peak will broaden. | ||
If an epitaxial layer is grown on a preface substrate, and the sample alignment is done to the substrate peak, a shift in omega will indicate a tilt in the crystal planes. A broadening could mean a dislocations, mosaicity, or curvature of the sample. | If an epitaxial layer is grown on a preface substrate, and the sample alignment is done to the substrate peak, a shift in omega will indicate a tilt in the crystal planes. A broadening could mean a dislocations, mosaicity, or curvature of the sample. | ||
[[File:RC.png|400px]] | [[File:RC.png|400px]] | ||
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PoleFigureAngles([1 1 1; 0 0 1],[3 1 1; 1 3 3]) | PoleFigureAngles([1 1 1; 0 0 1],[3 1 1; 1 3 3]) | ||
This will return a table and a plot | This will return a table and a plot | ||
10.02 60.00 13.26 0.00 | {| | ||
10.02 300.00 13.26 270.00 | ! style="text-align:left;"| Alpha | ||
10.02 180.00 13.26 90.00 | ! Beta | ||
31.48 30.00 13.26 180.00 | ! Alpha | ||
31.48 330.00 43.49 333.43 | !Beta | ||
31.48 90.00 43.49 296.57 | |- | ||
31.48 270.00 43.49 26.57 | |10.02 | ||
31.48 150.00 43.49 243.43 | |60.00 | ||
31.48 210.00 43.49 63.43 | |13.26 | ||
60.50 60.00 43.49 206.57 | |0.00 | ||
60.50 300.00 43.49 116.57 | |- | ||
60.50 180.00 43.49 153.43 | |10.02 |300.00 |13.26 |270.00|- | ||
|10.02 |180.00 |13.26 |90.00|- | |||
|31.48 |30.00 |13.26 |180.00|- | |||
|31.48 |330.00 |43.49 |333.43| | |||
|31.48 |90.00 |43.49 |296.57|- | |||
|31.48 |270.00 |43.49 |26.57|- | |||
|31.48 |150.00 |43.49 |243.43|- | |||
|31.48 |210.00 |43.49 |63.43|- | |||
|60.50 |60.00 |43.49 |206.57|- | |||
|60.50 |300.00 |43.49 |116.57|- | |||
|60.50 |180.00 |43.49 |153.43|} | |||
[[File:PoleFigureAngles.png|400px]][[File:Overlay.png|400px]] | [[File:PoleFigureAngles.png|400px]][[File:Overlay.png|400px]] | ||